Influence of internal stress and layer thickness on the...

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Journal of Physics D Applied Physics 2018 / 02

Influence of internal stress and layer thickness on the formation of hydrogen induced thin film blisters in Mo/Si multilayers

Bos, R A J M van den, Reinink, J., Lopaev, D.V., Lee, C J, Benschop, J P H, Bijkerk, Fred
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Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aaad86
Date:
February, 2018
File:
PDF, 1.04 MB
english, 2018
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