A 10 mW, 0.4 $\mu \text{g}/\surd $ Hz, 700 Hz $\Sigma \Delta $ High-Order Electromechanical Modulator for a High-Q Micromechanical Capacitive Accelerometer
Xu, Honglin, Wu, Junjie, Zhang, Hao, Liu, Haitao, Deng, QingVolume:
18
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2017.2780279
Date:
February, 2018
File:
PDF, 2.16 MB
english, 2018