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[IEEE 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Los Angeles, CA, USA (2017.4.9-2017.4.12)] 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - A study on young's modulus of electroplated gold cantilevers for MEMS devices
Nakajima, Hideaki, Chang, Tso-Fu Mark, Chen, Chun-Yi, Konishi, Toshifumi, Machida, Katsuyuki, Toshiyoshi, Hiroshi, Yamane, Daisuke, Masu, Kazuya, Sone, MasatoYear:
2017
Language:
english
DOI:
10.1109/NEMS.2017.8017021
File:
PDF, 662 KB
english, 2017