Metal Grain Granularity Study on a Gate-All-Around Nanowire...

IEEE Transactions on Electron Devices 2017 / 12 Vol. 64; Iss. 12

Metal Grain Granularity Study on a Gate-All-Around Nanowire FET

Nagy, Daniel, Indalecio, Guillermo, Garcia-Loureiro, Antonio J., Elmessary, Muhammad A., Kalna, Karol, Seoane, Natalia
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Volume:
64
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2017.2764544
Date:
December, 2017
File:
PDF, 2.75 MB
english, 2017
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