[IEEE 2017 International Conference on Optical MEMS and Nanophotonics (OMN) - Santa Fe, NM, USA (2017.8.13-2017.8.17)] 2017 International Conference on Optical MEMS and Nanophotonics (OMN) - Fabrication of plasmonic color filter by freestanding metal-insulator-metal gratings for MEMS tunable filter

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