Polysilicon Emitter Transistors Manufactured using a Novel...

MRS Proceedings 1989 / 1 Vol. 146

Polysilicon Emitter Transistors Manufactured using a Novel Limited Reaction Processing System

Ruddell, Fred, Parkes, Colin, Armstrong, B Mervyn, Gamble, Harold S
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Volume:
146
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-146-133
Date:
January, 1989
File:
PDF, 707 KB
english, 1989
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