Formation of Mn-germanide nanodots on ultrathin SiO...

Japanese Journal of Applied Physics 2018 / 01 Vol. 57; Iss. 1S

Formation of Mn-germanide nanodots on ultrathin SiO 2 induced by remote hydrogen plasma

Wen, Yinghui, Makihara, Katsunori, Ohta, Akio, Ikeda, Mitsuhisa, Miyazaki, Seiichi
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Volume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.01AF05
Date:
January, 2018
File:
PDF, 1.32 MB
english, 2018
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