An experimental approach for real time mass spectrometric...

An experimental approach for real time mass spectrometric CVD gas phase investigations

Nattermann, L., Maßmeyer, O., Sterzer, E., Derpmann, V., Chung, H. Y., Stolz, W., Volz, K.
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Volume:
8
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/s41598-017-18662-7
Date:
December, 2018
File:
PDF, 1.31 MB
english, 2018
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