Scanning Spreading Resistance Microscopy for Doping Profile...

IEEE Transactions on Nanotechnology 2017 / 11 Vol. 16; Iss. 6

Scanning Spreading Resistance Microscopy for Doping Profile in Saddle-Fin Devices

Yang, Chia-Ming, Wei, Chen-Kang, Chen, Hsiu-Pin, Luo, Jian-Shing, Chang, Yu Jing, Wu, Tieh-Chiang, Lai, Chao-Sung
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Volume:
16
Language:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/tnano.2017.2738667
Date:
November, 2017
File:
PDF, 515 KB
english, 2017
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