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Evaporation Driven Assembly of On-Chip Thermite Devices
Ervin, Matthew H., Bedair, Sarah S., Knick, Cory R., Tsang, Harvey, Isaacson, Brian, Piekiel, Nicholas W.Volume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2017.2757149
Date:
December, 2017
File:
PDF, 1.75 MB
english, 2017