[IEEE 2017 IEEE Asia Pacific Conference on Postgraduate Research in Microelectronics and Electronics (PrimeAsia) - Kuala Lumpur, Malaysia (2017.10.31-2017.11.2)] 2017 IEEE Asia Pacific Conference on Postgraduate Research in Microelectronics and Electronics (PrimeAsia) - Sensitivity of piezoresistive pressure sensor with inner diaphragm

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