[IEEE 2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Batu Ferringhi, Penang, Malaysia (2017.8.23-2017.8.25)] 2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Numerical simulation of thick metal passivation stress, Part II: Minimizing stress using Response Surface Methodology

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