Gaussian Process Regression for Virtual Metrology-Enabled...

IEEE Transactions on Semiconductor Manufacturing 2018 / 2 Vol. 31; Iss. 1

Gaussian Process Regression for Virtual Metrology-Enabled Run-to-Run Control in Semiconductor Manufacturing

Wan, Jian, McLoone, Sean
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Volume:
31
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2017.2768241
Date:
February, 2018
File:
PDF, 1.72 MB
english, 2018
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