Effectiveness of plasma and radical control for the low...

Effectiveness of plasma and radical control for the low temperature synthesis and properties of a-SiN x :H films using RF-near microwave PECVD

Sahu, Bibhuti Bhusan, Toyoda, Hirotaka, Han, Jeon Geon
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Volume:
25
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.5016618
Date:
February, 2018
File:
PDF, 7.05 MB
english, 2018
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