Effectiveness of plasma and radical control for the low temperature synthesis and properties of a-SiN x :H films using RF-near microwave PECVD
Sahu, Bibhuti Bhusan, Toyoda, Hirotaka, Han, Jeon GeonVolume:
25
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.5016618
Date:
February, 2018
File:
PDF, 7.05 MB
english, 2018