[IEEE 2017 30th International Vacuum Nanoelectronics Conference (IVNC) - Regensburg, Germany (2017.7.10-2017.7.14)] 2017 30th International Vacuum Nanoelectronics Conference (IVNC) - Ultra-high vacuum leak detection technology with the lower limit of 10 −16 Pam 3 /s for nano devices

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