[IEEE 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Los Angeles, CA, USA (2017.4.9-2017.4.12)] 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - An electrostatic vertical comb-drive micromirror with self-aligned assembly

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