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[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Energetic ion radiation effects on a silicon carbide (SiC) multimode resonating diaphragm
Chen, Hailong, Pashaei, Vida, Liao, Wenjun, Arutt, Charles N., Jia, Hao, McCurdy, Michael W., Zorman, Christian A., Reed, Robert A., Schrimpf, RonaldD., Alles, Michael L., Feng, Philip X.-L.Year:
2017
Language:
english
DOI:
10.1109/transducers.2017.7994217
File:
PDF, 1.12 MB
english, 2017