Optical vortex beam direct-writing photolithography
Li, Xiongfeng, Liang, Yiyong, Zhan, Shichao, Xu, Jianfeng, Bai, Jian, Wang, KaiweiVolume:
11
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.11.036503
Date:
March, 2018
File:
PDF, 1.01 MB
english, 2018