Silicon nanosprings fabricated by glancing angle deposition...

Materials & Design 2018 / 04 Vol. 144

Silicon nanosprings fabricated by glancing angle deposition for ultra-compliant films and interfaces

Antartis, Dimitrios A., Mott, Ryan N., Chasiotis, Ioannis
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Volume:
144
Language:
english
Journal:
Materials & Design
DOI:
10.1016/j.matdes.2018.02.017
Date:
April, 2018
File:
PDF, 2.95 MB
english, 2018
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