Wet Etched High Aspect Ratio Microstructures on Quartz for...

IEEJ Transactions on Sensors and Micromachines 2007 Vol. 127; Iss. 7

Wet Etched High Aspect Ratio Microstructures on Quartz for MEMS Applications

Liang, Jinxing, Kohsaka, Fusao, Matsuo, Takahiro, Ueda, Toshitsugu
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Volume:
127
Year:
2007
Language:
english
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.127.337
File:
PDF, 2.23 MB
english, 2007
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