Spring constant measurement using a MEMS force and...

Journal of Micromechanics and Microengineering 2018 / 04 Vol. 28; Iss. 4

Spring constant measurement using a MEMS force and displacement sensor utilizing paralleled piezoresistive cantilevers

Kohyama, Sumihiro, Takahashi, Hidetoshi, Yoshida, Satoru, Onoe, Hiroaki, Hirayama-Shoji, Kayoko, Tsukagoshi, Takuya, Takahata, Tomoyuki, Shimoyama, Isao
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Volume:
28
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aaabf7
Date:
April, 2018
File:
PDF, 1.90 MB
english, 2018
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