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[IEEE 2017 IEEE SENSORS - Glasgow (2017.10.29-2017.11.1)] 2017 IEEE SENSORS - Direct measurements of anchor damping in MEMS resonators
Rodriguez, Janna, Gerrard, Dustin D., Glaze, Grant M., Chandorkar, Saurabh, Comenecia, Lizmarie, Chen, Yunhan, Flader, Ian B., Kenny, Thomas W.Year:
2017
Language:
english
DOI:
10.1109/ICSENS.2017.8233870
File:
PDF, 1.60 MB
english, 2017