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[IEEE 2017 1st International Conference on Electronics, Materials Engineering and Nano-Technology (IEMENTech) - Kolkata, India (2017.4.28-2017.4.29)] 2017 1st International Conference on Electronics, Materials Engineering and Nano-Technology (IEMENTech) - Design study of a portable permanent magnet ECR plasma source for thin film deposition
Kundu, Soumik Kumar, Karmakar, Samit, Mukherjee, Shamik, Majee, Shubham, Kundu, Suman, Taki, G. S.Year:
2017
Language:
english
DOI:
10.1109/IEMENTECH.2017.8076938
File:
PDF, 359 KB
english, 2017