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[IEEE 2017 47th European Microwave Conference (EuMC) - Nuremberg (2017.10.10-2017.10.12)] 2017 47th European Microwave Conference (EuMC) - Scanning microwave microscopy of aluminum CMOS interconnect lines buried in oxide and water
Jin, Xin, Xiong, Kuanchen, Marstell, Roderick, Strandwitz, Nicholas C., Hwang, James C. M., Farina, Marco, Goritz, Alexander, Wietstruck, Matthias, Kaynak, MehmetYear:
2017
Language:
english
DOI:
10.23919/eumc.2017.8231009
File:
PDF, 637 KB
english, 2017