Atomic Nature of the Growth Mechanism of Atomic Layer Deposited High-κ Y 2 O 3 on GaAs(001)-4 × 6 Based on in Situ Synchrotron Radiation Photoelectron Spectroscopy
Cheng, Chiu-Ping, Chen, Wan-Sin, Cheng, Yi-Ting, Wan, Hsien-Wen, Yang, Cheng-Yeh, Pi, Tun-Wen, Kwo, Jueinai, Hong, MinghweiVolume:
3
Language:
english
Journal:
ACS Omega
DOI:
10.1021/acsomega.7b01564
Date:
February, 2018
File:
PDF, 2.74 MB
english, 2018