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Characterization of aluminum nitride based films with high resolution X-ray fluorescence spectroscopy
Anagnostopoulos, D. F., Siozios, A., Patsalas, P.Volume:
123
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5013281
Date:
February, 2018
File:
PDF, 2.23 MB
english, 2018