[IEEE 2017 IEEE SENSORS - Glasgow (2017.10.29-2017.11.1)] 2017 IEEE SENSORS - The effects of poly-SiGe on sensing properties for ultra-low-power CMOS-embedded MEMS sensors
Kurui, Yoshihiko, Tomizawa, Hideyuki, Fujimoto, Akira, Saito, Tomohiro, Kojima, Akihiro, Ikehashi, Tamio, Sugizaki, Yoshiaki, Shibata, HidekiYear:
2017
Language:
english
DOI:
10.1109/ICSENS.2017.8233927
File:
PDF, 1.18 MB
english, 2017