[IEEE 2017 IEEE SENSORS - Glasgow (2017.10.29-2017.11.1)] 2017 IEEE SENSORS - High aspect ratio spiral resonators for process variation investigation and MEMS applications
Middelburg, L.M., Mansouri, B. El, van Zeijl, H.W., Zhang, G.Q., Poelma, R.H.Year:
2017
Language:
english
DOI:
10.1109/ICSENS.2017.8233945
File:
PDF, 943 KB
english, 2017