Electrical and Mechanical Properties of Micromachined...

Physica Scripta 2004 / 01 Vol. T114

Electrical and Mechanical Properties of Micromachined Vacuum Cavities

Kiihamäki, J, Ronkainen, H, Häärä, A, Mattila, T
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Volume:
T114
Language:
english
Journal:
Physica Scripta
DOI:
10.1088/0031-8949/2004/T114/049
Date:
January, 2004
File:
PDF, 253 KB
english, 2004
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