[IEEE 2017 IEEE SENSORS - Glasgow (2017.10.29-2017.11.1)] 2017 IEEE SENSORS - A high symmetry polysilicon micro hemispherical resonating gyroscope with spherical electrodes
Wan, Quan, Gu, Honghua, Fan, Bo, Zhao, Heming, Xu, Dacheng, Guo, ShuwenYear:
2017
Language:
english
DOI:
10.1109/ICSENS.2017.8233984
File:
PDF, 1.94 MB
english, 2017