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[IEEE 2017 IEEE SENSORS - Glasgow (2017.10.29-2017.11.1)] 2017 IEEE SENSORS - A force-balanced negative feedback method for MEMS based electrochemical seismic sensor
Li, Guanglei, Wang, Junbo, Chen, Deyong, Sun, Zhenyuan, Chen, Lianhong, Chen, JianYear:
2017
Language:
english
DOI:
10.1109/ICSENS.2017.8234176
File:
PDF, 1.19 MB
english, 2017