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[IEEE 2017 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) - Kamakura, Japan (2017.9.7-2017.9.9)] 2017 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) - Stacked nanowires/nanosheets GAA MOSFET from technology to design enablement
Barbe, J.-Ch., Barraud, S., Rozeau, O., Martinia, S., Lacord, J., Blaise, P., Zeng, Z., Bourdet, L., Triozon, F., Niquet, Y.Year:
2017
Language:
english
DOI:
10.23919/sispad.2017.8085250
File:
PDF, 745 KB
english, 2017