Optimization of hetero-epitaxial growth for the threading dislocation density reduction of germanium epilayers
Chong, Haining, Wang, Zhewei, Chen, Chaonan, Xu, Zemin, Wu, Ke, Wu, Lan, Xu, Bo, Ye, HuiLanguage:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2018.02.024
Date:
February, 2018
File:
PDF, 1.46 MB
english, 2018