Measurement of the vacuum-ultraviolet absorption spectrum...

Applied Physics Letters 2018 / 02 Vol. 112; Iss. 8

Measurement of the vacuum-ultraviolet absorption spectrum of low-k dielectrics using X-ray reflectivity

Choudhury, F. A., Nguyen, H. M., King, S. W., Lee, C. H., Lin, Y. H., Fung, H. S., Chen, C. C., Li, W., Benjamin, D., Blatz, J. M., Nishi, Y., Shohet, J. L.
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Volume:
112
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.5025180
Date:
February, 2018
File:
PDF, 1010 KB
english, 2018
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