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[IEEE 2017 IEEE International Reliability Physics Symposium (IRPS) - Monterey, CA, USA (2017.4.2-2017.4.6)] 2017 IEEE International Reliability Physics Symposium (IRPS) - Gate stack engineering to enhance high-κ/metal gate reliability for DRAM I/O applications
O'Sullivan, B.J., Ritzenthaler, R., Simoen, E., Dentoni Litta, E., Schram, T., Chasin, A., Linten, D., Horiguchi, N., Machkaoutsan, V, Fazan, P, Ji, YYear:
2017
Language:
english
DOI:
10.1109/IRPS.2017.7936365
File:
PDF, 962 KB
english, 2017