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[IEEE ESSDERC 2017 - 47th IEEE European Solid-State Device Research Conference (ESSDERC) - Leuven, Belgium (2017.9.11-2017.9.14)] 2017 47th European Solid-State Device Research Conference (ESSDERC) - Guidelines for intermediate back end of line (BEOL) for 3D sequential integration
Fenouillet-Beranger, C., Beaurepaire, S., Deprat, F., de Sousa, A. Ayres, Brunet, L., Batude, P., Rozeau, O., Andrieu, F., Besombes, P., Samson, M-P., Previtali, B., Nemouchi, F., Rodriguez, G., RodriYear:
2017
Language:
english
DOI:
10.1109/essderc.2017.8066639
File:
PDF, 2.22 MB
english, 2017