Room temperature bonding and debonding of polyimide film...

Japanese Journal of Applied Physics 2018 / 02 Vol. 57; Iss. 2S1

Room temperature bonding and debonding of polyimide film and glass substrate based on surface activate bonding method

Takeuchi, Kai, Fujino, Masahisa, Matsumoto, Yoshiie, Suga, Tadatomo
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Volume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.02BB05
Date:
February, 2018
File:
PDF, 1.54 MB
english, 2018
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