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Modeling, Fabrication, and Characterization of SiC Concentrically Matched Differential Capacitance Output Pressure Sensors
Beker, Levent, Maralani, Ayden, Lin, Liwei, Pisano, Albert P.Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2018.02.027
Date:
February, 2018
File:
PDF, 966 KB
english, 2018