[IEEE 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium ((EFTF/IFC) - BESANÇON, France (2017.7.9-2017.7.13)] 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFC) - Improving coupling coefficient distribution on BAW filters manufactured on 200mm wafers

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