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[IEEE 2017 IEEE 14th International Conference on Group IV Photonics (GFP) - Berlin, Germany (2017.8.23-2017.8.25)] 2017 IEEE 14th International Conference on Group IV Photonics (GFP) - Optical proximity correction in geometry sensitive silicon photonics waveguide crossings
Celo, D., Dumais, P., Liu, W., Zhang, C., Goodwill, D. J., Jiang, J., Bernier, E.Year:
2017
Language:
english
DOI:
10.1109/GROUP4.2017.8082188
File:
PDF, 281 KB
english, 2017