![](/img/cover-not-exists.png)
3-Axis, Ultrahigh-Sensitivity, Miniature Acceleration Sensor
Bakhoum, Ezzat G., Cheng, Marvin H. M., Kyle, Roger A.Volume:
8
Language:
english
Journal:
IEEE Transactions on Components, Packaging and Manufacturing Technology
DOI:
10.1109/tcpmt.2017.2773499
Date:
February, 2018
File:
PDF, 1.41 MB
english, 2018