Control of Radial Potential Profile by Biased Segmented...

Control of Radial Potential Profile by Biased Segmented Endplatesin an ECR Plasma

Tsushima, Akira, Sato, Noriyoshi
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Volume:
60
Journal:
Journal of the Physical Society of Japan
DOI:
10.1143/JPSJ.60.2665
Date:
August, 1991
File:
PDF, 914 KB
1991
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