Process technology for IBM 14-nm processor designs...

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IBM Journal of Research and Development 2018

Process technology for IBM 14-nm processor designs featuring silicon-on-insulator FinFETs

Stiffler, S. R., Ramachandran, R., Henson, W. K., Zamdmer, N. D., McStay, K., Rosa, G. La, Boyd, K. M., Lee, S., Ortolland, C., Parries, P. C.
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Year:
2018
Language:
english
Journal:
IBM Journal of Research and Development
DOI:
10.1147/JRD.2018.2800518
File:
PDF, 368 KB
english, 2018
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