Morphology of Thin Films Formed by Oblique Physical Vapor Deposition
Gruener, Christoph, Liedtke, Susann, Bauer, Jens, Mayr, Stefan G., Rauschenbach, BerndLanguage:
english
Journal:
ACS Applied Nano Materials
DOI:
10.1021/acsanm.8b00124
Date:
February, 2018
File:
PDF, 1.47 MB
english, 2018