Characterization of electron kinetics regime with electron energy probability functions in inductively coupled hydrogen plasmas
Kim, June Young, Cho, Won-Hwi, Dang, Jeong-Jeung, Chung, Kyoung-Jae, Hwang, Y. S.Volume:
23
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4942421
Date:
February, 2016
File:
PDF, 1.34 MB
english, 2016