Robust Method of Fabricating Epitaxially Encapsulated MEMS Devices with Large Gaps
Chen, Yunhan, Flader, Ian B., Shin, Dongsuk D., Ahn, Chae Hyuck, Rodriguez, Janna, Kenny, Thomas W.Volume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2017.2758388
Date:
December, 2017
File:
PDF, 1.90 MB
english, 2017