[IEEE 2017 19th International Conference on Solid-State...

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[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung, Taiwan (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Electrostatic microshutter arrays

Li, M. J., Brown, A. D., Burns, D. E., Kelly, D. P., Kim, K., Kutyrev, A. S., McCandliss, S. R., Moseley, S. H., Mikula, V., Oh, L. H.
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Year:
2017
Language:
english
DOI:
10.1109/transducers.2017.7994522
File:
PDF, 1.65 MB
english, 2017
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