[IEEE 2017 IEEE International Ultrasonics Symposium (IUS) -...

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[IEEE 2017 IEEE International Ultrasonics Symposium (IUS) - Washington, DC, USA (2017.9.6-2017.9.9)] 2017 IEEE International Ultrasonics Symposium (IUS) - Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: Influence of intrinsic stress and sputtering parameters

Mertin, Stefan, Pashchenko, Vladimir, Parsapour, Fazel, Sandu, Cosmin S., Heinz, Bernd, Rattunde, Oliver, Christmann, Gabriel, Dubois, Marc-Alexandre, Muralt, Paul
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Year:
2017
Language:
english
DOI:
10.1109/ultsym.2017.8091776
File:
PDF, 57 KB
english, 2017
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