[IEEE 2017 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2017.12.2-2017.12.6)] 2017 IEEE International Electron Devices Meeting (IEDM) - A physics-based Quasi-2D model to understand the wordline (WL) interference effects of junction-free structure of 3D NAND and experimental study in a 3D NAND flash test chip
Chen, Wei-Chen, Lue, Hang-Ting, Hsieh, Chih-Chang, Lee, Yung-Chun, Du, Pei-Ying, Hsu, Tzu-Hsuan, Chang, Kuo-Pin, Wang, Keh-Chung, Lu, Chih-YuanYear:
2017
Language:
english
DOI:
10.1109/IEDM.2017.8268328
File:
PDF, 509 KB
english, 2017