[IEEE 2017 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2017.12.2-2017.12.6)] 2017 IEEE International Electron Devices Meeting (IEDM) - Towards optimal ESD diodes in next generation bulk FinFET and GAA NW technology nodes
Chen, S.-H., Hellings, G., Linten, D., Chiarella, T., Mertens, H., Boschke, R., Mitard, J., Kubicek, S., Ritzenthaler, R., Bury, E., Wang, N., Groeseneken, G., Mocuta, A., Horiguchi, N.Year:
2017
Language:
english
DOI:
10.1109/IEDM.2017.8268346
File:
PDF, 1013 KB
english, 2017